플라즈마 중합된 ppMMA 유기 박막을 절연층으로 한 유기박막 트랜지스터의 제작

Title
플라즈마 중합된 ppMMA 유기 박막을 절연층으로 한 유기박막 트랜지스터의 제작
Other Titles
Fabrication of OTFT with plasma polymerized methylmethacrylate organic thin film
Authors
신백균
Issue Date
2007
Publisher
대한전기학회
Series/Report no.
2007 대한전기학회 하계학술대회 논문집 pp 1347~1348
Abstract
In this paper, ITO gate electrode surface was modified using O2 plasma and organic gate insulating layers were deposited on the ITO surface using plasma polymerization technique. In order to investigate the influence of the plasma coupling method and plasma conditions on the plasma polymerized methyl methacrylate (ppMMA) thin film properties, inductively coupled (ICP) and capacitively coupled plasma (CCP) were used to generate the plasma and the plasma parameters were varied. The ppMMAs were investigated using atomic force microscopy (AFM) and a Fourier Transform Infrared (FT-IR) spectroscopy. Dielectric constants of the ppMMA thin films were investigated using a impedance analyzer (HP4192A, LF Impedance Analyzer). Current-Voltage (I-V) characteristics of the organic thin film transistors (OTFTs) were investigated using a source measurement unit (SMU: Keithley 2612). Proposed method can be applied to dry-process to fabricate OTFTs during overall fabricating steps.
URI
http://dspace.inha.ac.kr/handle/10505/34363
Appears in Collections:
College of Engineering(공과대학) > Electrical Engineering (전기공학) > Journal Papers, Reports(전기공학 논문, 보고서)
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