Analysis of ZnO nanorod growth from inclined columnar seed layer

Analysis of ZnO nanorod growth from inclined columnar seed layer
이승걸; 박세근; 오범환
ZnO nanorods Lateral growth Inclined c-axis ZnO seeds Hydrothermal deposition
Issue Date
Series/Report no.
MICROELECTRONIC ENGINEERING ; Vol110 Startpage 446 Endpage 449
Laterally-grown ZnO nanorods have been applied to UV sensors with an interdigit structure. The unidirectional and lateral growth of nanorods from ZnO seeds can provide lower contact resistance than that of bidirectionally grown ZnO nanorods. The lateral growth of ZnO nanorods requires a metal barrier to prevent vertical growth and the ZnO seed layer should have an inclined columnar structure for unidirectional growth. The inclined columnar growth of the ZnO seed layer can be formed by oblique-angle sputter-deposition. To understand the unidirectional growth mechanism in a hydrothermal method from an inclined columnar seed layer, this study examined the effects of the thickness of the seed layer, width of the metal barrier and seed layer etch time on the growth morphology. A patterned Cr layer serves as an etching mask for ZnO seeds, and over-etching provides a metal barrier for lateral growth. For lateral growth, the ZnO seed layer thickness and width of the undercut under Cr metal electrodes should be similar. Etched surface profile of each side of the ZnO seed layers is affected by the crystallinity and inclined orientation, and ZnO surface structure is a key factor for unidirectional growth. ZnO nanoplates can be formed at one side and ZnO nanorods can be grown at the other side due to the different positions of the (0002) c-plane at each side of the etched surface.
Appears in Collections:
College of Engineering(공과대학) > Information and Communication Engineering (정보통신공학) > Journal Papers, Reports(정보통신공학 논문, 보고서)
Files in This Item:

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.