High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors

Title
High S/N Ratio Slotted Step Piezoresistive Microcantilever Designs for Biosensors
Authors
조종두
Keywords
step microcantilever; self-heating; biosensors; piezoresistivity; thermal drifting; bimetallic effect
Issue Date
2013
Publisher
SENSORS
Series/Report no.
SENSORS; vol.13 startpage 4088 endpage 4101
Abstract
This study proposes new microcantilever designs in slotted step configuration to improve the S/N ratio of surface stress-based sensors used in physical, chemical, biochemical and biosensor applications. The cantilevers are made of silicon dioxide with a u-shaped silicon piezoresistor in p-doped. The cantilever step length and piezoresistor length is varied along with the operating voltage to characterise the surface stress sensitivity and thermal drifting sensitivity of the cantilevers when used as immunosensor. The numerical analysis is performed using ANSYS Multiphysics. Results show the surface stress sensitivity and the S/N ratio of the slotted step cantilevers is improved by more than 32% and 22%, respectively, over its monolithic counterparts.
URI
http://dspace.inha.ac.kr/handle/10505/31415
ISSN
1424-8220
Appears in Collections:
College of Engineering(공과대학) > Mechanical Engineering(기계공학) > Journal Papers, Reports(기계공학 논문, 보고서)
Files in This Item:
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