MEMS 응용을 위한 Ar+ 이온 레이저에 의한 단결정/다결정 실리콘 식각 특성

Title
MEMS 응용을 위한 Ar+ 이온 레이저에 의한 단결정/다결정 실리콘 식각 특성
Other Titles
Characteristics of single/poly crystalline silicon etching by Ar? ion laser for MEMS applications
Authors
이영삼
Keywords
single/poly crystalline silicon etching, Ar+ ion laser, MEMS
Issue Date
1999
Publisher
대한전기학회
Series/Report no.
전기학회논문지C; Vol.48 No.5
URI
http://dspace.inha.ac.kr/handle/10505/29443
ISSN
1229-246X
Appears in Collections:
College of Engineering(공과대학) > Electrical Engineering (전기공학) > Local Access Journal, Report (전기공학 논문, 보고서)

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