Electrical Insulation Properties of the Polyimide Prepared by VDPM

Title
Electrical Insulation Properties of the Polyimide Prepared by VDPM
Authors
이덕출
Keywords
Electrical Insulation Properties, Polyimide, VDPM
Issue Date
1999
Publisher
IEEE
Series/Report no.
Conference on Electrical Insulation and Dielectric Phenomena ; Vol.1
Abstract
The polyimide thin films, which are synthesized with pyromellictic dianhydride(PMDA) and 4,4’- diaminodiphenyl ether(DDE), were fabricated by vapor deposition polymerized method of dry processes. In order to analyze the characteristics required for the inter-layer insulation films of semiconductor devices, the molecular structure and uniformity, the variation of the internal composition element, the permeation depth of upper electrode, the breakdown strength are experimentally investigated.
URI
http://dspace.inha.ac.kr/handle/10505/29421
ISSN
0084-9162
Appears in Collections:
College of Engineering(공과대학) > Electrical Engineering (전기공학) > Local Access Journal, Report (전기공학 논문, 보고서)

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