Design and Analysis of Electro-mechanical Characteristics of Micromachined Stainless Steel Pressure Sensor

Title
Design and Analysis of Electro-mechanical Characteristics of Micromachined Stainless Steel Pressure Sensor
Authors
장성필
Keywords
Finite-element methods (FEMs), lamination, micromachining, multiarrayed sensors, stainless steel.
Issue Date
2008
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Series/Report no.
IEEE Sensors Journal ; Vol.8 No.2
Abstract
This paper investigates multiarrayed (6 6) sensors based on laminated stainless steel membrane on the stainless steel substrate. For the fabrication of those sensors, micromachining techniques are combined with lamination process techniques. For the lamination between diaphragm and substrate, hot pressing technique is used with epoxy resin. The finite-element method is adopted to investigate the mechanical characteristics of membrane formed in the process and the electromechanical characteristics of sensors are measured. As results, the sensitivity of the device fabricated using these technologies is 9.03 ppm kPa 1 with a net capacitance change of 0.14 pF over a range 0?178 kPa.
URI
http://dspace.inha.ac.kr/handle/10505/29414
ISSN
1530-437X
Appears in Collections:
College of Engineering(공과대학) > Electrical Engineering (전기공학) > Local Access Journal, Report (전기공학 논문, 보고서)

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Browse