Preparation characterization of plasma polymer thin films for application to organic thin film transistor as gate

Preparation characterization of plasma polymer thin films for application to organic thin film transistor as gate
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Plasma polymerized methyl methacrylate (ppMMA) thin films were deposited by plasma polymerzation technique with different plasm power and then thermally treated at temperatures of 60°C to 150°C. In order to find a better preparation technique of the ppMMA for application to OTFT as dielectric layer, chemical composition, surface morphology, and electrical properties were investigated. Effects of the ppMMA thin film preparation conditions on the resulting thin film properties were discussed concerning O-H site content in the ppMMA, dielectric constant, leakage current density, and dielectric hysteresis. Recently poly styrene (PPS) and poly vinyl acetate (PVA) are being investigated, because their dielectric constant for PVA and PPS is high enough to be used for gate insulator in the OTFTs. We report characteristics of single layer dielectric constant for PMMA, PPS, PVA, and double layer of PPS/PVA prepared by different plasma power. Composition and electrical properties of the plasma polymerized insulating layer were investigated by FT-IR, I-V, and C-V measurements.
CHAPTER 1. Introduction 1 CHAPTER 2. Literature Review and Theory 4 2.1 OTFTs 4 2.1.1 Structure and operation 4 2.1.2 Penracene thin film growth 4 2.2 Materials 7 2.2.1 Polymers 7 2.2.2 Small molecules 7 2.2.3 Single crystals 7 2.3 Plasma polymerization 8 2.3.1 Theory of plasma 8 2.3.2 Process of plasma 9 2.3.3 Plamsa processing techniques include 9 2.3.4 Plasma polymerization coatings 10 2.4 Gate dielectric materials 12 2.4.1 PMMAPVAPPS 12 2.4.2 Preparation technologies for gate dielectric materials 13 2.5 Surface treatment of gate dielectrics 17 2.5.1 AFM 17 2.5.2 Surface energy 17 2.5.3 Hysteresis behaviors 19 2.6 Substrate 22 2.6.1 ITO substrate 22 2.6.2 PET substrate 23 2.6.3 PET/ITO substrate 24 CHAPTER 3. Experiment 26 3.1 Insulator layer deposition by plasma polymerization 26 3.2 Post-deposition thermal treatment 27 3.3 Vacuum thermal evaporation for pentacene deposition 28 3.4 Characterization of the ppMMA thin films 29 CHAPTER 4. Results and Discussion 31 4.1 Chemical composition of the ppMMA 31 4.2 Surface morphology pentacene/pMMA/Si 34 4.3 The thickness of the insulator layer 37 4.4 Electrical properties of the ppMMA 39 4.5 Hysteresis 44 4.6 I-V curve in OTFTs 46 CHAPTER 5. Summary and Conclusion 50 References 51 Acknowledgements 53
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Medical School/College of Medicine (의학전문대학원/의과대학) > Medical Science (의학) > Theses(의학 석박사 학위논문)
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