Accuracy improvement of protrusion angle of carbon nanotube tips by precision multiaxis nanomanipulator

Title
Accuracy improvement of protrusion angle of carbon nanotube tips by precision multiaxis nanomanipulator
Authors
Song, W.Y.; Jung, K.Y.; O, B.H.; Park, B.C.
Keywords
carbon nanotube, nanomanipulator
Issue Date
2005-02
Publisher
AMER INST PHYSICS
Abstract
In order to manufacture a carbon nanotube (CNT) tip in which the attachment angle and position of CNT were precisely adjusted, a nanomanipulator was installed inside a scanning electron microscope (SEM). A CNT tip, atomic force microscopy (AFM) probe to which a nanotube is attached, is known to be the most appropriate probe for measuring the shape of high aspect ratio. The developed nanomanipulator has two sets of modules with the degree of freedom of three-directional rectilinear motion and one-directional rotational motion at an accuracy of tens of nanometers, so it enables the manufacturing of more accurate CNT tips. The present study developed a CNT tip with the error of attachment angle less then 10degrees through three-dimensional operation of a multiwalled carbon nanotube and an AFM probe inside a SEM. (C) 2005 American Institute of Physics.
URI
http://dspace.inha.ac.kr/handle/10505/1942
ISSN
0034-6748
Appears in Collections:
Medical School/College of Medicine (의학전문대학원/의과대학) > Medical Science (의학) > Journal Papers, Reports(의학 논문, 보고서)
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