경사입사 증착을 이용한 나노구조 다공성 광학박막의 제작 및 특성 연구

Title
경사입사 증착을 이용한 나노구조 다공성 광학박막의 제작 및 특성 연구
Authors
압두스소바한
Keywords
경사입사증착을이용한나노구조다공성광학박막의제작및특성연구
Issue Date
2010
Publisher
인하대학교
Abstract
Studying the optical properties of nanostructured thin films is a major focus of nanotechnology research, motivated by the ability to controllably alter optical behavior. In this research, the main goal is to study the improvement of the optical and physi
Description
1. INTRODUCTION 1 2. THIN FILM GROWTH AND OBLIQUE ANGLE DEPOSITION 5 2.1 Introduction 5 2.2 Physical Vapor Deposition 7 2.3 Thin Film Growth 9 2.3.1 Nucleation 10 2.3.2 Island stage 14 2.3.3 Coalescence stage 15 2.3.4 Channel stage 16 2.3.5 C
URI
http://dspace.inha.ac.kr/handle/10505/14860
Appears in Collections:
College of Natural Science(자연과학대학) > Physics (물리학) > Theses(물리학 석박사 학위논문)
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