High speed logic 회로용 Co / refractory metal 복합 salicide transistor 형성에 관한 연구 =

Title
High speed logic 회로용 Co / refractory metal 복합 salicide transistor 형성에 관한 연구 =
Authors
이수천
Keywords
하이스피드로직회로
Issue Date
1997
Publisher
인하대학교
URI
http://dspace.inha.ac.kr/handle/10505/11479
Appears in Collections:
College of Engineering(공과대학) > Materials Science & Engineering (신소재공학) > Theses(신소재공학 석박사 학위논문)
Files in This Item:
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