RF 마그네트론 스퍼터링을 이용한 WO3/Ag/WO3 투명전극의전기·광학적 특성 연구

Title
RF 마그네트론 스퍼터링을 이용한 WO3/Ag/WO3 투명전극의전기·광학적 특성 연구
Other Titles
A Electrical and Optical studies of WO3/Ag/WO3 Transparent Electrode by RF Magnetron Sputtering
Authors
신백균
Keywords
Multilayer, WO3 thin film, Process gas flow ratio
Issue Date
2014-11
Publisher
전기학회논문지
Series/Report no.
전기학회논문지 ; 63권 11호 pp 1533~1537
URI
http://dx.doi.org/10.5370/KIEE.2014.63.11.1533
http://dspace.inha.ac.kr/handle/10505/39354
ISSN
1975-8359
Appears in Collections:
College of Engineering(공과대학) > Electrical Engineering (전기공학) > Local Access Journal, Report (전기공학 논문, 보고서)

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