Reliable fabrication method of transferable micron scale metal pattern for poly(dimethylsiloxane) metallization

Title
Reliable fabrication method of transferable micron scale metal pattern for poly(dimethylsiloxane) metallization
Authors
Lim, K.S.; Chang, W.J.; Koo, Y.M.; Bashir, R.
Keywords
dimethylsiloxane, PDMS
Issue Date
2006
Publisher
ROYAL SOC CHEMISTRY
Abstract
We have developed a reliable fabrication method of forming micron scale metal patterns on poly( dimethylsiloxane) ( PDMS) using a pattern transfer process. A metal stack layer consisting of Au - Ti - Au layers, providing a weak but reliable adhesion, was deposited on a silicon wafer. The metal stack layer was then transferred to a PDMS substrate using serial and selective etching. We demonstrate that features as small as 2 mu m were reliably transferred on to the PDMS substrate for use as interconnects and electrodes for biosensors and flexible electronics application.
URI
http://dspace.inha.ac.kr/handle/10505/1972
ISSN
1473-0197
Appears in Collections:
College of Engineering(공과대학) > Biotechnology (생명공학) > Journal Papers, Reports(생명공학 논문, 보고서)
Files in This Item:
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