Design and analysis of laminated stainless steel membrane-based microsensors

Title
Design and analysis of laminated stainless steel membrane-based microsensors
Authors
Lee, H.S.; Chang, S.P.; Cho, C.
Keywords
finite-element methods (FEMs), lamination, micromachining, multiarrayed sensors
Issue Date
2008-02
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Abstract
This paper investigates multiarrayed (6 x 6) sensors based on laminated stainless steel membrane on the stainless steel substrate. For the fabrication of those sensors, micromachining techniques are combined with lamination process techniques. For the lamination between diaphragm and substrate, hot pressing technique is used with epoxy resin. The finite-element method is adopted to investigate the mechanical characteristics of membrane formed in the process and the electromechanical characteristics of sensors are measured. As results, the sensitivity of the device fabricated using these technologies is 9.03 ppm kPa(-1) with a net capacitance change of 0.14 pF over a range 0-178 kPa.
URI
http://dspace.inha.ac.kr/handle/10505/1848
ISSN
1530-437X
Appears in Collections:
College of Information Technology & Engineering (IT공과대학) > Electronic Engineering (전자공학) > Journal Papers, Reports(전자공학 논문, 보고서)
Files in This Item:
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