A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors

Title
A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors
Authors
Cho, C.
Keywords
Surface stress, Biosensor, Microcantilever
Issue Date
2008-11
Publisher
MOLECULAR DIVERSITY PRESERVATION INT
Abstract
This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress induced moment, and then applied to the microcantilever free end to produce deflection. The stress analysis of the proposed and conventional designs is performed, followed by dynamic analysis of the proposed design. We found that the Sader equation is more accurate than Stoney in predicting cantilever deflections, and that for increasing the sensitivity of a microcantilever biosensor increasing the cantilever thickness is more practical.
URI
http://dspace.inha.ac.kr/handle/10505/1841
ISSN
1424-8220
Appears in Collections:
College of Engineering(공과대학) > Mechanical Engineering(기계공학) > Journal Papers, Reports(기계공학 논문, 보고서)
Files in This Item:
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