Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers

Title
Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers
Authors
Cho, C.
Keywords
Sensor, Surface stress, Microcantilever, Resonant Frequency
Issue Date
2009-04
Publisher
MOLECULAR DIVERSITY PRESERVATION INT
Abstract
Arrays of microcantilevers are increasingly being used as physical, biological, and chemical sensors in various applications. To improve the sensitivity of microcantilever sensors, this study analyses and compares the deflection and vibration characteristics of rectangular and trapezoidal profile microcantilevers. Three models of each profile are investigated. The cantilevers are analyzed for maximum deflection, fundamental resonant frequency and maximum stress. The surface stress is modelled as in-plane tensile force applied on the top edge of the microcantilevers. A commercial finite element analysis software ANSYS is used to analyze the designs. Results show paddled trapezoidal profile microcantilevers have better sensitivity.
URI
http://dspace.inha.ac.kr/handle/10505/1840
ISSN
1424-8220
Appears in Collections:
College of Engineering(공과대학) > Mechanical Engineering(기계공학) > Journal Papers, Reports(기계공학 논문, 보고서)
Files in This Item:
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