Local structure and conduction mechanism in amorphous In-Ga-Zn-O films

Title
Local structure and conduction mechanism in amorphous In-Ga-Zn-O films
Authors
Jeong, Jae Kyeong
Keywords
structure, conduction, amorphous, In-Ga-Zn-O film
Issue Date
2009-01
Publisher
American Institute of Physics
Abstract
The local structures of amorphous In–Ga–Zn–O (InGaZnO4 and In2Ga2ZnO7) films were examined by x-ray absorption spectroscopy and fine structure analysis. The local metal-oxygen coordination in both films indicated bipyramidal GaO5, ZnO5, and trigonal InO6 clusters. Further analyses showed splitting of the Zn–O bond length suggesting distortion of the ZnO5 cluster, which evidenced the existence of localized holes in the Zn atoms. In combination with the abundance of In 5s electrons, this shows that the In–Zn hopping interactions contribute to electrical conduction.
URI
http://dspace.inha.ac.kr/handle/10505/1523
ISSN
0003-6951
Appears in Collections:
College of Engineering(공과대학) > Materials Science & Engineering (신소재공학) > Journal Papers, Reports(신소재공학 논문, 보고서)
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